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SCE 1414 Aluminum Chamber Plasma System


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Reactor Chamber 14" Aluminum

  • Shelves can be configured for primary or downstream plasma
  • 14" Cube aluminum chamber
  • Multiple shelves (4)
  • Front loading
  • View port on front door with UV shield

Control System

  • Siemens S7-200 control package
  • PLC based for ease of operation
  • "Touch-Panel" interface with digital display
  • Process memory on board
  • Pass word protected
  • Gas flow with Mass Flow Controller
  • Safety interlocks for door, vacuum and power

RF Power Source

  • 0-600 Watt, 13.56 MHz
  • Auto-Tune matching network
  • Forward and reflected power reading
  • 3% Power regulation
  • Optional: 300 or 1000 Watt 13.56 MHz

Control System Options

  • Additional gas channels
  • Capacitance manometer
  • Temperature sensor
  • Throttle valve
  • Nitrogen backfill

Dimensions

  • Cabinet: 559-mm x 686-mm x 915-mm (w,d,h)
  • Pump 30" L x 12" W x 18" H
  • Shipping weight, 600  lbs Crated weight

Vacuum System

  • 23.30 CFM Standard service with all interconnects
  • Oxygen Preparation to Class "B" Specification