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SCE 1818 Aluminum Chamber Plasma System


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Reactor Chamber 18" Aluminum

  • Shelves can be configured for primary or downstream plasma
  • 18" Cube aluminum chamber
  • Multiple shelves (6)
  • Front loading
  • View port on front door with UV shield

Control System

  • Siemens S7-200 Control package
  • PLC based for ease of operation
  • "Touch-Panel" interface with digital display
  • Process memory on board
  • Pass word protected
  • Gas flow with mass flow controller
  • Safety interlocks for door, vacuum and power

RF Power Source

  • 0-600 Watt, 13.56 MHz
  • Auto-Tune matching network
  • Forward and reflected power reading
  • 3% Power regulation
  • Optional: 1000 Watt 13.56 MHz supply

Control System Options

  • Additional gas channels
  • Capacitance manometer
  • Temperature sensor
  • Throttle valve
  • Nitrogen backfill
  • Slow pump and particle reduction

Dimensions

  • Cabinet 711-mm x 711-mm x 1651-mm (w,d,h)
  • Pump 30" L x 12" W x 18" H
  • Shipping weight   1050  lbs Crated

Vacuum System

  • 42.4 CFM Standard service with all interconnects
  • Oxygen Preparation To Class "B" Specifications