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SCE 3030 Aluminum Chamber Plasma System

SCE 30 Aluminum Chamber Plasma System

 
Reactor Chamber 30" Aluminum
  • Shelves can be configured for primary or downstream plasma
  • 30" Cube aluminum chamber
  • Multiple shelves (8)
  • Front loading
  • View port on front door with UV shield

Control System

  • Siemens S7-200 Control package
  • PLC based for ease of operation
  • "Touch-Panel" interface with digital display
  • Process memory on board
  • Pass word protected
  • Gas flow with mass flow controller
  • Selectable gas correction via S7-200
  • Safety interlock for door, vacuum and power

RF Power Source

  • 0-1000 Watt, 13.56 MHz
  • Auto-Tune matching network
  • Forward and reflected power reading

Control System Options

  • Additional gas channels
  • Capacitance manometer
  • Temperature sensor
  • Throttle valve
  • Nitrogen backfill

Vacuum System

  • 66 CFM Dry mechanical pump
  • Size dependent upon application

Vacuum System Options

  • Corrosive service
  • Mist filter

Dimensions

  • Cabinet 915-mm x 915-mm x 1829-mm (w,d,h)
  • Pump 30" x 12" x 18" (l,w,h)
  • Shipping weight 1600 Lbs. crated