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SCE 108-AL Aluminum Chamber Plasma System

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Reactor Chamber 8" Aluminum

  • Shelves can be configured for primary or downstream plasma
  • 8" Cube aluminum chamber
  • Standard configuration 1 RF Hot Shelf 1 Groung shelf 
  • Front loading
  • View port on front door with UV shield

Control System

  • Siemens S7-200 control package
  • PLC based for ease of operation
  • "Touch-Panel" interface with digital display
  • Process memory on board
  • Pass word protected
  • Gas flow with Mass Flow Controller
  • Safety interlocks for door, vacuum and power

RF Power Source

  • 0-125 Watt, 13.56 MHz
  • Manual matching network
  • Forward and reflected power reading

 

Control System Options

  • Additional gas channels 
  • Temperature sensor
  • Throttle valve
  • Nitrogen backfill

Dimensions

  • Cabinet: 559-mm x 686-mm x 915-mm (w,d,h)
  • Pump 17" L x 7" W x 10" H
  • Shipping weight, 150  lbs Crated weight

Vacuum System

  • 3.8 CFM Standard service with all interconnects
  • Oxygen Preparation to Class "B" Specification (Optional)