SEM / TEM SAMPLE PREPARATION:
Hummer 6.2 Sputter System
Hummer 6.6 Sputter System
Hummer 8.0 Sputter System
Carbon Deposition / Evaporation
R&D SPUTTER SYSTEMS:
Hummer 8.1 DC Sputter System
Hummer 8.2 RF Sputter System
Hummer 8.3 DC/RF Sputter System
R&D, PILOT PRODUCTION SYSTEMS:
Hummer Box Chamber Sputter System (BC Series)
Custom Deposition Systems
Anatech USA sputtering systems are manufactured to meet your specific requirements.
Our process, control and system engineers use standard system platforms, add standard or custom modules, depending on your application, your process, and your throughput requirements. Anatech USA builds the right tool for your particular job.
-SEM sample preparation, Photovoltaics, Materials Research, Renewable Energy, Microelectronics, CV Dot Matrix,
-Sputtering thin film layers for both Metals and Insulators
-High quality, dependable box systems for R&D and Pilot Production.
STANDARD SYSTEM PLATFORMS include:
- DC sputter: 0 - 60, 500, 1500, 5000 Watts
- RF sputter: 13.56 MHz, 0 - 100, 150, 300, 600, 1000, 3000 Watts
- Source Sizes:1", 2", 3", 4", 6" diameter sputter sources
- Rectangular sources on request
-Aluminum or Stainless Steel
-Size range 4", 6", 8" or 12" substrates
- 3" to 8" diameter substrate capable
Substrate Holder Platforms:
- Up to 12" diameter capable
- Heated, cooled
- Stationary, rotating
- Ion assist
- "Touch-Panel" PLC automated
- PC automated
-Roughing 1.5 cfm to 66 cfm
-High vacuum 81 l/ps to 1000 l/ps
-Turbomolecular, Cryogenic or Diffusion pumps are application dependent.
-Reactive and Corrosive service are application dependent.