Plasma Applications

• Reactive Ion and Planar Etch
• Scanning Electron Microscopy Sample Preparation
• Transmission Electron Microcopy Sample Preparation
• Substrate Preclean
• Plasma Surface Modification for Wetability (hydrophilic)
• Plasma Surface Activation for Non-Wetability (hydrophobic)
• Photoresist Strip
• Wet Etch Residue Clean
• Ashing
• Deflash Prior to Wire Bonding for Hybrid Circuits, Multichip Modules, Flip Chips
• Molecular Level Cleaning Prior to Bonding, Potting, Printing, Marking, Painting
• Photomask Descum
• Epoxy Bleedout Removal

Sputtering Applications

• Metal Thin Film Deposition
• Dielectric Thin Film Deposition
• Scanning Microscopy Sample Preparation
• Transmission Electron Microcopy Sample Preparation