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SCE 106 Quartz Barrel Plasma System

SCE 106 Quartz Barrel Plasma System

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Control System

  • PLC  - "Touch-Panel" operation
  • Digital count down timer (hrs, min, sec)
  • On Screen vacuum display
  • Gas flow with needle valve control
  • Manual tuning standard
  • Automatic tuning optional

Reactor Chamber

  • 6" diameter x 8" long quartz chamber
  • RF shielded
  • Front load

Dimensions

  • 26" H x 23" W x 30" D
  • 275 lbs Crated weight

RF Power Source

  • 0-150 Watt RF 13.56 MHz supply
  • Forward and reflected power readings
  • Low frequency optional

Vacuum System

  • 3.8 CFM Standard service pump
  • 1 Phase 50/60 120/208 VAC
  • Package with all interconnecting hardware
  • Optional: Oxygen service. Class "B" Preparation