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SCE 110 Quartz Barrel Plasma System

SCE110 Front open Web(i1b5a4)

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Control System

  • PLC - "Touch-Panel" operation
  • Digital display of power, vacuum, gas flow and time
  • Gas Mass Flow Controllers (2) 500-sccm
  • Multiple recipes - on board memory
  • Pass word protection
  • Safety interlock for vacuum and power
  • 120-VAC, 50/60-Hz, 20-Amp

Control System Options

  • Additional gas channels - (Up to 3)
  • Capacitance manometer
  • Temperature sensor
  • Throttle valve

RF Power Source

  • 0-600 Watt, 13.56 MHz
  • Forward and reflected power reading
  • 3% Power regulation
  • Automatic RF Tuner for load match

Reactor Chamber

  • Quartz chamber
  • 10" dia x 18" L
  • Front loading
  • View port on front door with UV shield

Reactor Chamber Options:

  • Planar electrode
  • Quartz trays or rails, (Up to 3 trays)

Dimensions

  • System contained in a standard 19 inch half rack
  • 36"H x 21"W x 30"D

Vacuum System

  • Electro-pneumatic vacuum valve
  • 23.3 CFM Standard service with all interconnects
  • 115 or 208-VAC, 1-phase, 20-Amp

Vacuum System Options

  • Oxygen service
  • Corrosive service
  • Nitrogen back fill
  • Slow Pump particle reduction
  • Mist eliminator