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SCE 115 Quartz Barrel Plasma System

SCE 115 Quartz Barrel Plasma System

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Control System

  • PLC - "Touch-Panel" operation
  • Digital display of power, vacuum, gas flow and time
  • Multiple recipes - on board memory
  • Pass word protection
  • Gas Mass Flow Controllers, (2) 500-sccm
  • Safety interlock for vacuum and power

Control System Options

  • Additional gas channels - (Up to 3)
  • Capacitance manometer
  • Temperature sensor
  • Throttle valve

Dimensions

  • Standard 30" Equipment rack
  • 22" W x 36" H x 27" D
  • Pump 30" L x 12" W x 18" H
  • Shipping weight — 1000  lbs Crated weight

Reactor Chamber

  • 10" x 18" quartz chamber
  • Front loading
  • View port on door with UV shield
  • Planar plate electrodes - (1 Hot, 1-Ground)

Reactor Chamber Options

  • Water cooled electrode

RF Power Source

  • 0-600 Watt, 13.56 MHz
  • Forward and reflected power reading
  • 3% Power regulation
  • Automatic RF Tuner for load match

RF Power Options

  • 300 Watt, 13.56 MHz
  • 1000 Watt 13.56 MHz

Vacuum System

  • 23.3 CFM mechanical pump with all
    interconnects
  • Oxygen Service - Class "B" preparation
  • 115 or 208-VAC, 1-phase, 20-Amp

Vacuum System Options

  • Slow pump particle reduction
  • Fast vent
  • Chiller / recirculator
  • Nitrogen back fill
  • Corrosive service
  • Mist eliminater