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SCE 150 Quartz Barrel Plasma System

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Control System

  • Programmable logic controller
  • Digital count down timer (hrs, min, sec)
  • Digital pressure display Gas flow with mass flow controllers
  • Single gas input
  • Single process

Control System Options

  • Nitrogen backfill
  • Data logging
  • Slow pump and particle reduction Throttle valve

Power Requirements

  • 115VAC 15A 50/60HZ
  • 220VAC optional
  • 115VAC 15A for Vacuum on separate feed

Reactor Chamber

  • Quartz chamber 10" dia x 18"L
  • Front loading
  • View port on front door with UV shield
  • 9" x 16" planar electrode
  • Front to back gas laminar gas flow
    for +/- 11 nm uniformity

Dimensions

  • Control Module — 20" W x 7.8" H x 20" D
  • Chamber Module — 20.4" W x 18.8" H x 36" D
  • Shipping Weight — 250 lbs Crated Weight

RF Power Source

  • 0-300 Watt, 13.56 MHz
  • Forward and reflected power reading
  • 3% Power regulation
  • Manual matching network

Vacuum System

  • 14.7 CFM Standard service with all interconnects, larger pump optional

Vacuum System Options

  • Oxygen service
  • Corrosive service Mist eliminator
  • Slow pump / particle reduction optional