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SP 604 Quartz Barrel Plasma System


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Control System

  • PLC - "Touch-Panel" operation
  • Digital count down timer (hrs, min, sec)
  • Digital pressure display Gas flow with mass flow controller(s) Single gas input
  • Single process

Control Systems Options

  • Two program / two gases Data logging
  • Capacitance manometer
  • Slow pump and particle reduction Throttle valve
  • Nitrogen Backfill

Dimensions

  • Control Module — 20"W x 7.8"H x 20"D
  • Chamber Module — 20.4"W x 18.8"H x 36"D
  • Shipping Weight — 250 lbs Crated weight

Reactor Chamber

  • System Standard - Four (4) chambers 4" x 8" diameter Quartz
  • Front loading
  • View port on front door with UV shield

Vacuum System

  • 23 CFM Standard service with all interconnects Mist Filter

RF Power Source

  • 0-600 Watt, 13.56 MHz
  • Forward and reflected power reading 3% power regulation
  • Optional 300 Watt 13.56 MHz supply Low frequency optional

Vacuum System Options

  • Oxygen service preparation to Class "B" Specifications