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SCE 10 Tumbler Plasma System

SCE 10 Tumbler Plasma System


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Control System

  • Computer controlled
  • Keypad data entry and digital display
  • Gas flow with mass flow controllers
  • Single gas input

Control System Options

  • Additional gas channels
  • Capacitance manometer
  • Throttle valve
  • Nitrogen backfill
  • Slow pump and particle reduction

Power Requirements

  • 115VAC 20A 50/60HZ
  • 220VAC optional
  • 115VAC 20A for vacuum on separate feed

Reactor Chamber Aluminum

  • Aluminum Basket
  • Front loading
  • View port on front door with UV shield

Dimensions

  • Standard full height 19" Equipment rack

Vacuum System

  • Standard service with all interconnects

RF Power Source

  • 0-600 Watt, 13.56 MHz (standard)
  • Forward and reflected power reading
  • ± 3% Power regulation
  • Optional 300 or 1000 Watt 13.56 MHz supply

Vacuum System Options

  • Oxygen service
  • Corrosive service
  • Mist eliminator
  • Certain applications may require higher gas through put than standard. Pump needs to be sized accordingly.